A hybrid bacteria and microparticle detection platform on a CMOS chip: Design, simulation and testing considerations

This paper presents a hybrid bacteria and microparticles detection platform based on a CMOS technology. Vertical face to face microelectrode arrays ar... Microelectrodes - CMOS integrated circuits - Microchannel - Microorganisms - Sensors - Electrodes - Impedance - biological techniques - biosensors - CMOS integrated circuits - finite element analysis - integrated circuit design - integrated circuit testing - microchannel flow - microorganisms - hybrid bacteria detection platform - microparticle detection platform - CMOS chip design - vertical face-face microelectrode arrays - CMOS postprocessing - deep reactive ion etching - microchannels - impedance variations - electronic circuits - microelectronic-microfluidic hybrid system - finite element analysis method - FEM - CMOS chip simulation - CMOS chip testing

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